Bake-out

We have a purpose built bake out oven 3.4 by 1.5 meters. A bake out is an effective way of removing surface contamination from your vacuum system that would otherwise desorb slowly when the system is under vacuum preventing ultra-high vacuum (UHV ) pressures from being reached.

It features a; 300 L/S scroll baking pump, MKS RGA 200 AMU, 450 L/S ion pump and is fully programmable up to 300^oc for metal seals and 150^oc for Viton seals.

Standard Hivac all metal bake pass specification:
Pressure – 5×10-10 Mbar
Leak rate – 1×10-12 Mbar.l/s
Outgassing rate – 1×10-12Mbar.l\s.cm2
RGA – Well baked = AMU 18 < AMU 2
Leak tight = AMU 28 > x4 AMU 32
AMU 14 < AMU 16
General 0.5%
Chlorine 0.1%
Hydrocarbon 0.1%
Fluorocarbon 0.1%

Standard Hivac O-ring bake pass specification:
Pressure – 5×10-8 Mbar
Leak rate – 1×10-9 Mbar.l/s
Outgassing rate – 1×10-10 Mbar.l\s.cm2
RGA – Well baked = AMU 18 < AMU 2
Leak tight = AMU 28 > x4 AMU 32
AMU 14 < AMU 16
General 0.5%
Chlorine 0.2%
Hydrocarbon 0.2%
Fluorocarbon 0.2%